BESSY II
Reflectometer - Optics beamline

Optics Beamline

  • Collimated PGM (SX700-1)
  • 10 - 2000 eV
  • Moderate resolution
  • Polarisation linear
  • Efficient higher order light suppression
  • Low divergence, small spot size

Reflectometer Experimental Station

  • Reflectometry
  • At-wavelength metrology
  • Quality control of large optical elements
  • In-house R&D
  • User operation
  • Short-term access

This soft x-ray bending magnet beamline is equipped with a Plane Grating Monochromator operated in collimated light (collimated PGM). It uses the SX700-1 monochromator equipped with two blazed diffraction gratings produced in-house. The bending magnet beamline is optimised for moderate resolution at very high specular purity and efficient stray light reduction by a 4-mirror High order suppressor (HIOS) and a Filter and Slit Unit (FSU).

At this beamline a versatile reflectometer for at-wavelength metrology is coupled. This 10-axes instrument allows characterisation of real live-sized optical elements. This permanent endstation is located in a clean-room hutch.

The Optics Beamline with the reflectometer is primarily dedicated to the in-house R&D in optics development and at-wavelength metrology of our in-house produced diffraction gratings and (multilayer) optical elements.

Beamtime at this station is available by user-proposals or, at short-term request, by cooperation with our Institute for Nanometre Optics and Technology (FG-INT).

 

 

Reflectometry Station

Reflectometry - At-wavelength metrology

  • Quality control of optical elements
  • In-house R&D
  • User operation
  • Short-term access

The versatile 10 axes UHV-reflectometer is a permanent end station of the Optics Beamline delivering UV and XUV radiation. It is located in a clean-room hutch at DIP 1.1.

The samples are adjustable within six degrees of freedom, and the reflectivity can be measured at all incidence angles for both s- and p-polarisation geometry.

The reflectometer is primarily dedicated to the in-house R&D in optics development and at-wavelength metrology of our in-house produced diffraction gratings and (multilayer) optical elements.

Beamtime at this station is available by user-proposals or, at short-term request, by cooperation with our Institute for Nanometre Optics and Technology (FG-INT).

 

Film - click on Downloads in box on right side: reflectometer-film.mp4

Film - click on Downloads in box on right side: reflectometer-film.mp4

Beamline Energy Range
10 - 2000 [eV]
contacts
Dr. Franz Schäfers
Dr. Andrey Sokolov
Techniques
Emission or Reflection
  • Reflectrometry
control/Data analysis
Control Software Type
  • tbc
Data Output Type
  • tbc
Data Output Format
  • tbc
in partnership with