BL 10.1 R - DXRL

Deep X-ray lithography (DXRL) allows the production of high aspect ratio three dimensional structures in polymer with quasi perfect side-wall verticality and optical quality roughness. These structures can then be used as templates to mass-produce microparts made out of a large variety of metals, alloys or ceramics. The technique used to fabricate these parts is called LIGA.
It opens a wide variety of potential applications in the field of microelectromechanical systems (MEMs), fibre and integrated optics, microfluidic devices and interconnection technology. Moreover, the beamline performs an irradiaiton of samples with controlled X-ray doses, allowing therefore material science studies and the fabrication of microdevices made of new materials.

Beamline Energy Resolution
2.5 * 10-3 [meV] @ 8 [eV]
Beamline Energy Range
2 - 20000 [eV]
Max Flux On Sample
0.5 * 1010 [ph/s] @ 5000 [eV]
Spot Size On Sample Hor
-55 - 55 [mm]
Spot Size On Sample Vert
-5 - 5 [mm]
Divergence Hor
0 - 5 [mrad]
Divergence Vert
0 - 0.5 [mrad]
Angle Of Incidence Light On Sample Value
90 [degrees]
Benedetta Marmiroli
Alessio Turchet
  • X-ray lithography
  • Other - Chemistry
  • Other - Energy
  • Sustainable energy systems
Engineering & Technology
  • Aeronautics
  • Other - Engineering & Technology
  • Space
Information & Communication Technologies
  • Components & Micro-systems
Life Sciences & Biotech
  • Medicine
Material Sciences
  • Knowledge based multifunctional materials
  • Other - Material Sciences
  • Astronomy/Astrophysics/Astroparticles
  • Other - Physics
control/Data analysis
Control Software Type
  • Jenoptik Software,
    Tango scanner stage drive control software
Data Output Type
  • Files containing exposure parameters, TEXT Files
Data Output Format
  • .dat
Softwares For Data Analysis
  • Matlab
Equipment That Can Be Brought By The User
Customized X ray Mask , Customized Sample Holder ( liquid, powder); Tilted sample holder but this must be discussed in advance with local contact as there is restriction on the dimensions.